| high vacuum |
represents pressures between 10"3 and 10"6 ton absolute. Flow in this region is molecular or Newtonian, with very little interaction between individual molecules. A number of specialized industrial applications, such as ion implantation in the semiconductor industry, fall in this range. Nonmechanical ejector or cryogenic pumps (which are not discussed in this book) are usually used.
출처: www.kinequip.com/pressure_terminology.asp
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